Semiconductor Gas Analyzer

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  Gasboard-3052

  Trace Oxygen Gas Analyzer

  Gasboard-3052 is a trace oxygen analyzer designed for high-precision trace-level oxygen measurement in industrial processes. Based on Zirconia technology, Gasboard-3052 delivers fast response and stable long-term performance, with no routine calibration required and low maintenance requirements. It is widely used in applications including semiconductor manufacturing, air separation, and inert gas welding, enabling precise oxygen monitoring and control in critical industrial processes. Featuring a compact modular design, Gasboard-3052 is easy to install in complex process environments. An intuitive user interface provides concentration display, calibration, and relay alarm functions for simple and convenient operation. The analyzer supports multiple analog outputs, including 4–20 mA and 0–1, 0–5, and 0–10 VDC, with device information query available via RS232.

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  Gasboard-2060

  NDIR SiF4 Gas Sensor

  Gasboard-2060 is a high-performance SiF4 gas sensor designed for real-time semiconductor chamber cleaning endpoint detection (EPD) in silicon-based CVD deposition chambers. Based on Non-Dispersive Infrared (NDIR) technology with a specially designed gas chamber, it provides highly selective and precise SiF4 concentration measurement in semiconductor chamber cleaning processes. Gasboard-2060 monitors SiF4 concentration in real time, enabling fast and precise chamber cleaning endpoint indication to reduce cleaning time and gas consumption while minimizing chamber wear and extending component service life. Featuring a modular design, Gasboard-2060 allows easy installation. It supports both analog and digital communication outputs, enabling calibration and adjustment functions for convenient integration and maintenance.

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  Gasboard-2061

  NDIR WF6 Gas Sensor

  Gasboard-2061 is a high-performance WF6 gas sensor designed for real-time semiconductor chamber cleaning endpoint detection (EPD) in tungsten CVD (WCVD) deposition chambers. Based on Non-Dispersive Infrared (NDIR) technology, Gasboard-2061 enables highly sensitive and accurate WF6 concentration measurement under complex process conditions. By tracking WF6 concentration changes in real time, Gasboard-2061 enables precise and timely endpoint indication, helping to reduce cleaning time and over-cleaning gas consumption, while minimizing chamber wear and extending the lifetime of critical system components. Designed with a compact modular architecture, Gasboard-2061 allows easy installation. It supports both analog and digital communication interfaces, enabling calibration and adjustment for convenient integration and maintenance.

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