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NDIR WF6 Gas Sensor

Gasboard-2061

Gasboard-2061 is a high-performance WF6 gas sensor designed for real-time semiconductor chamber cleaning endpoint detection (EPD) in tungsten CVD (WCVD) deposition chambers. Based on Non-Dispersive Infrared (NDIR) technology, Gasboard-2061 enables highly sensitive and accurate WF6 concentration measurement under complex process conditions. By tracking WF6 concentration changes in real time, Gasboard-2061 enables precise and timely endpoint indication, helping to reduce cleaning time and over-cleaning gas consumption, while minimizing chamber wear and extending the lifetime of critical system components.

Designed with a compact modular architecture, Gasboard-2061 allows easy installation. It supports both analog and digital communication interfaces, enabling calibration and adjustment for convenient integration and maintenance.

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Features

NDIR technology for high sensitive and accurate WF6 measurement.
Rapid response for real-time concentration change tracking.
Low zero drift and high repeatability for consistent measurement performance.
Robust sealing design for stable operation in vacuum environments.
316L corrosion-resistant construction for durability in harsh process conditions.
Analog and digital communication interfaces for convenient integration and maintenance.

Specifications

Measurement Component	WF6
Range	0-200 mTorr
Repeatability^{1 2}	±0.5%
Accuracy^{1 2}	±1%F.S.
Operating Voltage	24VDC
Operating Current	1.5A (max)
Analog Interface	Analog Output: 0–5 VDC (4 ch) or 4–20 mA (4 ch) Analog Input: 0–10 VDC (1 ch)
Digital Interface	Digital Output: 4 ch Digital Input: 1 ch
Communication	RS485
Sampling Port	NW25
Leak Rate ³	≤1 x 10-6 Pa·m3/s (He)
Operating Ambient Temperature	(20～35) ℃

1. All data in the table are measured under standard atmospheric pressure.
2. Measurement standard gases are provided by institutions certified by national metrology authorities. All gases are diluted in dry nitrogen with a purity of ≥99.999%.
3. The above performance is determined after calibration. All sensors are 100% calibrated during production.
4. Measurements are conducted at 25 °C ambient temperature.

For more details, please feel free to contact our sales: sales@gasanalyzer.com.cn.

Related Product

Gasboard-2060: NDIR SiF4 Gas Sensor; Gasboard-2060 is a high-performance SiF4 gas sensor designed for real-time semiconductor chamber cleaning endpoint detection (EPD) in silicon-based CVD deposition chambers. Based on Non-Dispersive Infrared (NDIR) technology with a specially designed gas chamber, it provides highly selective and precise SiF4 concentration measurement in semiconductor chamber cleaning processes. Gasboard-2060 monitors SiF4 concentration in real time, enabling fast and precise chamber cleaning endpoint indication to reduce cleaning time and gas consumption while minimizing chamber wear and extending component service life. Featuring a modular design, Gasboard-2060 allows easy installation. It supports both analog and digital communication outputs, enabling calibration and adjustment functions for convenient integration and maintenance.

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